M.Sc. Micro- and Nanotechnology

Aalto University

Application deadline: January 31
Tuition fee:
  • Free (EEA)
  • Free (Non-EEA)
Start date: September  2015
Credits (ECTS): 120 ECTS
Duration full-time: 24 months
  • English
Delivery mode: On Campus
Educational variant: Full-time

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Dive into the nano-scale world in state-of-the-art facilities!

The programme offers studies in basic materials and circuit theory, processing, functional devices and characterisation. After the common core courses, students can specialise in a variety of topics including electronic circuit design, electronics fabrication and reliability, microsystems, photonics and nanotechnology.

Why choose this programme?
The programme emerges from the trend of miniaturisation of electronic devices. The tools and processes originally developed for integrated circuit industry are nowadays used to fabricate micro- and nanosize devices that have electrical, optical, mechanic, fluidistic and chemical functionality. Graduates from the programme typically find employment in high-technology companies, especially in the semiconductor industry. The programme also gives a strong background for continuing on to doctoral studies.


Suitable candidates for the programme can have a background in electronics engineering, physics or materials science. Studies in the programme focus on the operating principles of micro- and nanosize devices, including optoelectronic, photonic and fluidistic devices. Emphasis is also given to fabrication techniques used in the semiconductor industry, including practical courses in the industry-scale clean room environment of the Micronova research centre.

Study environment
Studies are largely based on research conducted in Micronova. The mission of Micronova is to develop innovative and enabling technologies, and to use these new possibilities in practical and commercial applications and systems in close cooperation with industry. Micronova's areas of expertise include sensors based on microelectromechanical systems (MEMS), optical and wireless sensors, wireless communications and photonics systems, biosensors and fluidistics, nano and quantum devices as well as millimeter wave and optical instruments for space applications.

Study programme
The two-year programme (120 ECTS) consists of six study modules:

* Basic Module in Micro- and Nanotechnology (20-22 ECTS)
* Intermediate Module in Micro- and Nanotechnology (20 ECTS)
* Advanced Module in the chosen specialisation 19-22 ECTS)
* Methodological Studies (10 ECTS)
* Elective Studies (20 ECTS)
* Master's Thesis (30 ECTS)

Students can choose between three different specializations.

Basic Module in Micro- and Nanotechnology

* Semiconductor devices
* Optoelectronics
* Materials and microsystem integration
* Basic integrated circuit design
* Photonics and integrated optics

Intermediate Module in Micro- and Nanotechnology

* Microfabrication
* Nanotechnology
* Microsystems technology
* Microsensors
* Analog integrated systems

Advanced Module, choose one of the following modules:

Micro- and Nanosciences

* Microsensors
* Semiconductor technology
* Photonics and integrated optics
* Nanotechnology
* Microfluidics and BioMEMS
* Physics of optical communications
* Materials for electronics
* Surface physics
* Methods in modern biophysics
* Microscopy of nanomaterials
* Laser technology and optics

Materials for Microsystems

* Design for reliability
* Microsystems integration
* Materials compatibility
* Thin film technology
* Materials for electronics
* Microfabrication
* Microscopy of nanomaterials

Micro- and Nanoelectronic Circuit Design

* Analog integrated circuits
* Computer-aided circuit design
* Electronic circuit design
* Integrated RF-circuit
* Digital microelectronics I: System-level electric design
* VHDL hardware description language
* Electronic system-level design methods

In addition, students can choose courses from other departments and Schools of Aalto as well as interdisciplinary Aalto courses as elective studies.


Admission criterion for the Micro and Nanotechnology programme is a high quality Bachelor's degree encompassing a minimum of 180 ECTS credits, i.e., it must be a degree of at least three years of full-time studies. A degree in electrical engineering, electronics, physics or material science is required. Knowledge in one of the following subject areas is an advantage: nanoscience, semiconductor physics, photonics, electronics/microelectronic circuit design.

Language requirements
Successful applicants must have an excellent command of Finnish, Swedish or English. Please note that some degree programmes may require knowledge of Finnish.

All guest students and international students applying for master's or doctoral studies offered in English must demonstrate their proficiency in English. Applicants are required to attach an official language test report to their application.

The tests suitable for this purpose are listed below with their minimum scores*:


Total score: 92 (IBT), 580 (PBT)
Writing score: 22 (IBT), 4.0 (PBT)


Overall Band Score: 6.5 Writing Band Score: 5.5


Grades accepted: A, B, C

* The minimum requirements are very strict. If your score does not fulfill the minimum requirements, you are not eligible to apply and your application cannot be processed.
** IBT = Internet Based Test, PBT = Paper Based Test
*** Academic IELTS only
**** CAE = Cambridge Certificate of Advanced English, CPE = Cambridge Certificate of Proficiency in English.

English Language Requirements

IELTS band: 6.5
CAE score: (read more)

Cambridge English: Advanced (CAE) is part of the Cambridge English suite and is targeted at a high level (IETLS 6.5-8.0). It is an international English language exam set at the right level for academic and professional success. Developed by Cambridge English Language Assessment - part of the University of Cambridge - it helps you stand out from the crowd as a high achiever.

60 (Grade C)
TOEFL paper-based test score : 580
TOEFL iBT® test: 92


Scholarships are available for non-EU/EEA nationals in all of the programmes with the tuition fees. There will not be any scholarship options for programmes with no tuition fees.

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