M.Sc. Microsystems Engineering

  • On Campus
  • 24 months
  • EUR145 per Semester (International

    Tuition fee for the international students.

    EUR145 per Semester (EEA

    European Economic Area tuition fee is applicable to the students from EU countries, Iceland, Liechtenstein, Norway and Switzerland.

  • English ( Take IELTS test or Find a course )
University of Freiburg | Freiburg, Germany
The Master of Science in Microsystems Engineering is taught in English and was offered for the first time in the Winter Semester of 2007/08. It was designed for students from Germany and abroad with a bachelor degree in microsystems engineering or a related discipline (electrical and mechanical engineering, mechatronics).



The MSc in Microsystems Engineering complies with the Bologna Declaration for European education. It provides students with an excellent education in Microsystems Engineering and qualifies them for an industrial career in research and development or further studies in a PhD programme. The programme’s highly interdisciplinary curriculum offers a wide variety of electives, ensuring that students acquire a broad spectrum of the skills needed to keep abreast with this dynamic and rapidly evolving field.

Detailed Course Facts

Application deadline May 1 for non-EU citizens / June 1 for EU-citizens
Tuition fee
  • EUR 145 per semester (International

    Tuition fee for the international students.

  • EUR 145 per semester (EEA

    European Economic Area tuition fee is applicable to the students from EU countries, Iceland, Liechtenstein, Norway and Switzerland.

Start date
Credits (ECTS) 120 ECTS

Microsystems, MEMS or micromachines: many names for an exciting and dynamic engineering discipline which combines expertise from areas as diverse as electrical engineering, biology, manufacturing technology and chemistry and thus allows engineers to conceive highly miniaturised, multifunctional systems used for medical and diagnostic purposes, in communication and information systems as well as in the automotive industry.

Duration full-time 24 months
Delivery mode On Campus
Educational variant Full-time

Course Content

The curriculum comprises courses in Assembly and packaging technology, Microelectronics, Micro-mechanics, MST design, Optical microsystems, Sensors, Signal processing, Dynamics of MEMS, Micro-actuators, biomedical microsystems, Micro-fluidics, MST design as well as Probability and statistics.

Concentrations are offered in the areas of

  • Circuits and systems
  • Design and simulation
  • Life sciences: Biomedical engineering
  • Life sciences: Lab-on-a-chip
  • Materials
  • Photonics
  • Process engineering
  • Sensors and actuators

In the second year, students are required to write a one-year Master's thesis, based on project work performed directly in a professor's research group, thus giving the graduate extensive, hands-on experience using state-of-the-art microsystems infrastructure.


The academic and language requirements for the MSc. Microsystems Engineering programme are:

  • Bachelor's degree in Engineering (e.g. electrical, mechanical, electronics engineering) with a result of at least 80% or 3.0 out of 4.
  • IELTS with a score of 6.5 or TOEFL with a score of 92 (or higher)

Work Experience

No work experience is required.

Not required

More Information


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University of Freiburg, Germany

Germany Already a comprehensive university at its founding in 1457, the University of Freiburg still offers undergraduate and graduate studies as well as professorial qualification in all important disciplines today: the humanities, natural and engineering sciences, medicine, law, and theology. This diversity also provides an ideal environment for innovative interdisciplinary studies.

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