M.Sc. Microsystems Engineering

  • On Campus
  • 24 months
  • EUR210 Year (Non-EEA)
  • English (Find a course)
University of Freiburg | Freiburg, Germany
The Master of Science in Microsystems Engineering is taught in English and was offered for the first time in the Winter Semester of 2007/08. It was designed for students from Germany and abroad with a bachelor degree in microsystems engineering or a related discipline (electrical and mechanical engineering, mechatronics).

Description of Microsystems Engineering


The MSc in Microsystems Engineering complies with the Bologna Declaration for European education. It provides students with an excellent education in Microsystems Engineering and qualifies them for an industrial career in research and development or further studies in a PhD programme. The programmeís highly interdisciplinary curriculum offers a wide variety of electives, ensuring that students acquire a broad spectrum of the skills needed to keep abreast with this dynamic and rapidly evolving field.

Detailed Course Facts

Application deadline May 1 for non-EU citizens / June 1 for EU-citizens
Tuition fee
  • EUR 210 Year (Non-EEA)
  • EUR 210 Year (EEA)
Start date October  2016
Credits (ECTS) 120 ECTS
Duration full-time 24 months
Delivery mode On Campus
Educational variant Full-time

Course Content

The curriculum comprises courses in Assembly and packaging technology, Microelectronics, Micro-mechanics, MST design, Optical microsystems, Sensors, Signal processing, Dynamics of MEMS, Micro-actuators, biomedical microsystems, Micro-fluidics, MST design as well as Probability and statistics.

Concentrations are offered in the areas of

  • Circuits and systems
  • Design and simulation
  • Life sciences: Biomedical engineering
  • Life sciences: Lab-on-a-chip
  • Materials
  • Process engineering
  • Sensors and actuators

In the second year, students are required to write a one-year Master's thesis, based on project work performed directly in a professor's research group, thus giving the graduate extensive, hands-on experience using state-of-the-art microsystems infrastructure.

Requirements for Microsystems Engineering

The English language masterís degree programme in Microsystems Engineering has been designed for national and international students with a bachelorís degree in a field closely related to microsystems engineering (e.g. electronics, mechanical engineering or physics). The selection procedure is very competitive. There are usually 250 - 300 applicants for 35 - 40 seats.

Application procedure To apply for the English masterís degree programme in Microsystems Engineering, please fill in the online application form which will be available here in April 2014. Print the filled form, sign it and send it by regular mail (not e-mail) to the address below together with the following documents:

  • A certified and (if necessary) translated copy (German or English) of your undergraduate diploma. If you have not yet completed your undergraduate studies, a certified transcript of records is sufficient
  • A certified and (if necessary) translated copy (German or English) of your grade transcript.
  • Proof of English proficiency (TOEFL, IELTS or Cambridge Certificate)*
  • GRE score (strongly recommended)
  • Curriculum vitae or résumé
  • Personal Statement of intent (explaining why you want to study the MSc. in Microsystems Engineering at the University of Freiburg)
  • At least one recommendation letter from a university professor to be submitted in a separate envelope, sealed and signed by the referee
  • APS certificate (for Chinese and Vietnamese applicants only)

Work Experience for Microsystems Engineering

No work experience is required.

More Information


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University of Freiburg, Germany

Germany Already a comprehensive university at its founding in 1457, the University of Freiburg still offers undergraduate and graduate studies as well as professorial qualification in all important disciplines today: the humanities, natural and engineering sciences, medicine, law, and theology. This diversity also provides an ideal environment for innovative interdisciplinary studies.

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