Microsystems Engineering, M.Sc.

  • Application Deadline
  • 24 months
  • Tuition Fee
    3000 EUR/year
    Tuition fee
    310 EUR/year
    Tuition fee
  • English (take IELTS)
University rank #82 (WUR) ,
The Microsystems Engineering programme is offered at the University of Freiburg. MSE ins an interdisciplinary programme that builds on a basic knowledge in electrical and mechanical engineering. 


The Microsystems Engineering programme is offered at the University of Freiburg. Microsystems, MEMS, or micromachines: many names for an exciting and dynamic engineering discipline which combines expertise from areas as diverse as electrical engineering, biology, manufacturing technology and chemistry and thus allows engineers to conceive highly miniaturised, multi-functional systems used for medical and diagnostic purposes, in communication and information systems as well as in the automotive industry. 

Although from the third semester on students can speicalise in two of the seven concentration areas, in the first year they have compulsory courses in all areas which play a role in microsystems engineering (such as micro-electronics, -mechanics, -fluidics, -optics and more).

Programme Structure

Courses include:

  • Microelectronics
  • Micro-mechanics
  • Micro-optics
  • Sensors
  • Micro-fluidics

Detailed Programme Facts

  • Programme intensity Full-time
    • Full-time duration 24 months
  • Credits
    120 ECTS
  • Languages
    • English
  • Delivery mode
    On Campus

English Language Requirements

You only need to take one of these language tests:

  • Minimum required score:


    The IELTS – or the International English Language Test System – tests your English-language abilities (writing, listening, speaking, and reading) on a scale of 1.00–9.00. The minimum IELTS score requirement refers to which Overall Band Score you received, which is your combined average score. Read more about IELTS.

    Take IELTS test
  • Minimum required score:


    The TOEFL – or Test Of English as a Foreign Language – offers an internet-based test (iBT). The final, overall iBT score ranges between 0 and 120, and includes a scaled average from the four components (reading, listening, speaking, and writing). Read more about TOEFL (iBT).

Academic Requirements

  • The English language master’s degree programme in Microsystems Engineering has been designed for national and international students with a bachelor’s degree in a field closely related to microsystems engineering (e.g. electronics, electrical or mechanical engineering, mechatronics or physics). The selection procedure is very competitive. There are usually 250 - 300 applicants for 35 - 40 seats.

Tuition Fee

  • International

    3000 EUR/year
    Tuition Fee
    Based on the original amount of 1500 EUR per semester and a duration of 24 months.
  • EU/EEA

    310 EUR/year
    Tuition Fee
    Based on the original amount of 155 EUR per semester and a duration of 24 months.

Living costs for Freiburg

790 - 1,100 EUR/month
Living Costs

The living costs include the total expenses per month, covering accommodation, public transportation, utilities (electricity, internet), books and groceries.


The Faculty of Engineering offers performance based part scholarships of 2400 Euro per year to the best 5 applicants.

StudyPortals Tip: Students can search online for independent or external scholarships that can help fund their studies. Check the scholarships to see whether you are eligible to apply. Many scholarships are either merit-based or needs-based.